Excimer laser

Sirius 1000 is a laser system using a discharge in a gas between two electrodes to produce UV radiation. The UV emitting component in the discharge is in this system the excited dimer XeCl. When the XeCl dissociates high energy UV photons are emitted and using a proper set of resonator mirrors, this results in the generation of a laser beam.

Revolutionary 3-stage discharge

Key technology in Sirius 1000 is in the firing and control of the gas discharge. NCLR has developed a three-stage ignition process to obtain a stable discharge enhancing the output power and beam quality.

The laser gas is pre-ionized using x-rays from a source outside the laser gas.

For the second step in creating the discharge a very short high voltage pulse is set on the electrodes to start the discharge homogeneously. The third and last step is a low voltage, high current pulse sustaining the discharge and therein creating the excimer molecule XeCl.

Advanced flow loop design

To enable high repetition rate operation the gas mixture is flowing at high speed between the electrodes in a sealed and specially designed flow loop system.

Gas handling

The gas handling system is equipped with several control and monitoring utilities.